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MAT SCI 222

Bruinwalk
Main Course

Growth and Processing of Electronic Materials

4 units
Taken?

Description

Lecture, four hours; discussion, one hour; outside study, seven hours. Requisites: courses 120, 130, 131. Thermodynamics and kinetics that affect semiconductor growth and device processing. Particular emphasis on fundamentals of growth (bulk and epitaxial), heteroepitaxy, implantation, oxidation. Letter grading.

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