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MAT SCI 223

Bruinwalk
Main Course

Materials Science of Thin Films

4 units
Taken?

Description

Lecture, four hours; discussion, one hour; outside study, seven hours. Requisites: courses 120, 131. Fabrication, structure, and property correlations of thin films used in microelectronics for data and information processing. Topics include film deposition, interfacial properties, stress and strain, electromigration, phase changes and kinetics, reliability. Letter grading.

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